JFIF|Photoshop 3.08BIM`@Revolutionary High-NA Lithography Optical System Set to Transfor720260617PSCIENMAGUAuthorbRevolutionary High-NA Lithography Optical System Set to Transform Semiconductor Chip Manufacturing Science@https://scienmag.com/revolutionary-high-na-lithography-optical-s© 2026 Sciencehttps://scienmag.com/In the rapidly advancing world of semiconductor technology, the relentless pursuit of smaller, faster, and more energy-efficient computer chips is critical to powering the next wave of innovation—from artificial intelligence mega-data centers to cutting-edge medical devices and ubiquitous consumer electronics. At the frontier of this evolution lies extreme ultraviolet (EUV) lithography, a sophisticated method capable […]ScienceTecTechnology and EngineeringTechnology and Engineering$advanced photolithography techniquesEUV lithography cost reduction*extreme ultraviolet lithography technology#high-NA lithography optical systems%high-resolution semiconductor etching"nanometer scale circuit patterning4Okinawa Institute of Science and Technology research,precision optical systems for semiconductors#reflective photomask in lithography"scalable EUV lithography solutions+semiconductor chip manufacturing innovation%Tsumoru Shintake lithography proposalC    !'"#%%%),($+!$%$C   $$$$$$$$$$$$$$$$$$$$$$$$$$$$$$$$$$$$$$$$$$$$$$$$$$$"H!1"AQa2q#BRbr$&3C%46DsSctB!1AQaq"2R#45$BTb3rCS ?n ~RJXB8K/B䡊v3X \+O0( @sCe*ZGϥ2Zɾ̱/bjL4Ak,,ː3ִ{K][؋i: `߭c-~6s1JQm춲0R)]tfJX~Ǩ&W|0ms(xQ#'ISdT(r#pG*Vq}NWy;%"hF$S.,&+S7(Mz 0q)Js'2VO~nݲ !^.w?z y5*r!\u)X42FfZʛ;q ,0?+inDE?dt)PnAA1S)Lj Ku)@(mMz͖PڒTOZqge;%dVGCr;_T7Nk`kDpI''n XW}jNHSۥݘ2@ >G*m3.b.s"7ǏZu8_H]tq,0O^Z?xyIJzQ"a3ȶ{0IJϙ46ᡞ[_П np#SHj8Zy )=:uT ++A(4M,یqTh]7qOrBEξ[[=O@*[<;K+ ,VfT˝Ih"+@tPqτ֛K51ÊʐxP(kIdd}ak^)jAߗR>viISa~`Wtȫ@?ΒS"cN*#WKZL8#i5jSJr0,^I:iv)ivR\K9](Yûdn+XXiRtº#K%ė<뎠iU$eϊ\P Oilk,*=[{("N?kqUn_ߴVNJOY*ab6>V|SC2`r14uhO™Z]OfqQ)I߇g)WanݠRR @IInꬨF a%פfUS)ūEۮ2UK { (C\q#ZqҖRqR6V7┉4I .a1J(juE40QԯWԟUe~r_ n}h@;VN^$ea8xρni-mHuvx hVj컓Rn\&ˬp[b*Ca$&"W9ʜ_ } 3.*⏥'iV5E3saG靏Cr93!c}q m%dBx{=*f|4J,Xy|$6K.Y&*ltbH8Pί@Ͷ v-Nh[VmƟ>p|͓-2N[9]MQL{R17/Mndš;~Q;d!RP-+:5gy!#$mg-5#:v_vd'ٹ1C8L\mC7J#"Ph$|KPsp LNf^h;|$%`֎쪯]??KZ` 7K2腒-=>Ag E5 4'18'mnutTf$2Q+ wC1b2PHh:j^YJ%AX[Vi2oN&/73+AXӭnS-["Ց6kAhgyٷ5A ֪12;Chx@Zj6c6`pyϺ#Ae*fTP3Ō'E e*t(6E6?ďsZ3gMYߴS̹/&/ιwS T_޶1JÆ|ĻfDw߭h-*Gx}I=iW&yi8BhٞIHMeSpVZ~QgO&iC 7WNѻ9~)IIIѻX:\t :Ca|ɮUy,aSSSh)eNt>覔촁EpIslZP XIXwь?uۢ#?X)4[Mzȣ/oKkmw"1ʒ[?J]`ɱ䝝H/t8rda~Υ]Qawk:(RM yGe~Tt{T8Ŏey evUY+DN8|q!#Jf6Oy,ht 3`LʟWq޴ZѨ+yh# =ݙЄ۩A嫇%(/o*JK>qhg(4ح,Xa \g4@ߙ6CmiZГ".i .g G7R~ur]\3Ǜ g2Rpc',dvk!GT8o-e;€ X/j+fJ/!dRpOO05[UclIW;E9iQc&]P}2׵\9 9_4,p2?t M#n @B8 \ݡSJxROBuEgT˫inc'9`ʬ/R{(Ddnhg` Ƕ=U]WD][DjqS%//dКakM]% g߅|pfqBEBBTG7.QW~S m.HJK 'q_:]mXZ+ j))k}37xSZub紻tfaW  cJO˄K :cݶ)sLFV&ڴsW%)#9I_Ɣ5>@p> h TV2XIk1h!Td$|v^ lA߅Ueǚm,-::NRӄ}PIW+pKR˂GsvSr.2 VSGdo^&$$Wuy^TGZq5 N5s"=>۟u!;U=u1&S2A @Jb",(Ia#! I*O$Yj:B#l_ZҠI$]< RX$Q# R;,0VcJn["Oe Dxr ڇ+Fu oĸ5+l>!▬cnt&{ʖSaA“ۦ5/D-JInP<Fs3m3 Ƣ6k ̞ajzc@Ilr ?ǐVrV'HAJ䜬*,~wƟ&=вKR`?H<|Ǖ&A,&pc`y)埧Zy깤Aן`:3sLLQNy*#W(4 JroNښ؍P;ڦFL_$]3yiwΞ A\`W+?,u$EBMQ\j@#4 Q?7%/DYI'BU<=#oQW4N1(^qĠ:ֺL[ ?{BPNIјz&K d%d~Ι4]EiO¼iS^ev]AJU_ז< DQ1?d܏{/p:+{ 4"4c}@-v̡W?%a+>,tIKmDqrq JxTzSy =xn=7xe>g vw LTcrwI88;u3Izr* d]Ps ˭r\1PԷ%B)ycrvĴ,2\o28TҎ?ZZ 0p:Dsi-+#4oTWpE5ˆqWMCxr_ >*!tOF7[1|n8M(g$wQ#dkiҐK4B":ZX01)ni9q+QsV7ϝu9F~w1FB|ZF2Sku87n:.<@ۄv.~̘!s Zc͉9=-I#e Turը& x1g(Zji)V vXǩ~ekKj)}E>,4()NrHjlR-i&R0̄:ʆ󎦄[N\q@=)#Iݖ➒8C|ZWpя5\ը&É_.-{BxQ%xr7w|#] +NED}?hmŸSSTvM1w&,>aRus =! !\%e!xPϥ:fɗE o8{Ŷ%J458ֿ[^OyVd4ʕ/R<5EluMҔ)}j׋}"jp4%?X@ܫ'`Ҥt.ޘm=)_)MGGsh)\Cԕ? GQA?,`i2?7J+;Q5yYm,& 3IQ*{گf hxF?<'nV ӄĒIj:YP}Ip<8z@\/Ki=sr.3V~xITi2 ]@/I)''5Vt]VÁ9.28TmG7[ϞS YiAGH<#)R3Jar_?wCs\1]Kwı3k=P.^&:&cTjv1jlQצ;CGօmˈFNJm+QfuqY^֛\! qQI*Bzs@m=\5%uq,0[9q3mz/Vˋ=C<1aYrwأwfILJӥdYveF9QC) $T_.C@@-{\ŷKwI8A#aUN bS㾐+)қݑO].VrÔ,8924&k2)$%@a*ыi6=ޔ8Ban@501v=t6l{+W,o('9$7]\KtP-[R[< )xї \l* ZC5>)r]08@q)SP]vdB}'!4c~kve a;¤KOf?nk]. +&޷>,G񵍏zU6 *f*de UڏTr$nNl>E'|H '2ZmQh78@-x#ꤝ{?Q*t+zGzc6 5T`Coga^P̄p?=u3Hۛ\5)dh *czM-eҴNnamz:%J\|-GV}{|$WyRlہGl]ydS}BZ4i~f|+DUUOUkpH JQ җgo:*ʺqt"r޷葆!\!ŠI_vB܃lRJӰ t*vIT\d=7Z4.5^'<ZUeu͔f0DŽE0px6r{j՚_88[ViM"!$bIٍI-W+,7  ҷ]YQS|cӫÇƔYVB+U.Xa`PxmyڮzX%쥃>cΝnoV1seoE~IhKN6syV5_5aȭ$p2ݝQ`-e3Dm?BYtDŽfsWي?Qon|Xd5vOv:)]~e!0h=Ж;JOt8RZdD-j  y[ G@5*Ww&5ףYi |߀| M-NpŽ*W%5k_8]"x@M.i+JRpzZo8b\ZrC*]UBTFMMk;cηv}J9_j=vxǭ95]އjTOGErz_{ (9jTo&{o5X/o)G !#oJ+<剐!J5Q